We dispose in the cleanroom of a SEM, a surface profiler and 2 optical microscopes
FEG - SEM [1] Raith Pioneer Two
Our Seconadary Electron Microscope with field-emission gun provide us the ideal system to inspect our sample during processes.
Technical specifications :
Mecanic Surface Profilometer - Dektak 150
This equipment is use for :
> Step height measurements
> Film stress analyses
> Roughness surface characterization
> Advanced 3D mapping
In the following table, you can see the step resolution :
| Resolution at 3mg | |
Available Stylus : 2.5µm & 12.5µm (stylus radius)
Stylus Force : 0.03mg to 15mg (in function of materials)
Optical Microscope - Nikon LV100 et LV150
> Optical microscope equipt with 4 optics (x5, x20, x50, x150)
> Illumination in Bright/DarkField
The laboratory also possesses a platform of electron microscopy, detail here.
[1] ( field-emission gun scanning electron microscope)